Study of iron–chromium alloys and mixed oxides using focused ion beam optical spectroscopy

Abstract

Focused ion beam optical spectroscopy (FIBOS) is a material analysis technique in which information is derived from optical emission generated when a finely focused energetic ion beam hits a sample. It is capable of providing information on the atomic composition and the chemical state of the sample. Chemical mapping and depth profiling of samples are also possible. Here FIBOS has been used to study a series of Fe–Cr alloys and mixed oxides of the same transition metals in ultra-high vacuum under Ar⁺ and Ga⁺ ion bombardment, with and without an oxygen bleed. Linear fits of the signal ratios versus composition ratios were observed.

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