Carbon coatings on silicon carbide by reaction with chlorine-containing gases

(Note: The full text of this document is currently only available in the PDF Version )

Yury G. Gogotsi, In-Deok Jeon and Michael J. McNallan


Abstract

Carbon films have been produced on the surface of β-SiC particles by reaction with Ar–Cl2 and Ar–Cl2–H2 gas mixtures at atmospheric pressure and temperatures of 600–1000 °C. The structure and composition of the carbon films have been investigated using XRD, SEM, EDS, TEM, FTIR and Raman spectroscopy. BET and TG were also used for measuring the amount of carbon formed in the reaction. Uniform nanoporous carbon films with surface area exceeding 1000 m2 g-1 were obtained by reactions with Ar–Cl2 gas at 600–1000 °C. Based on Raman spectroscopy and electron diffraction data, these films were identified as nanocrystalline graphite. An addition of hydrogen to the gas mixtures results in the etching of graphitic carbon. Traces of diamond were found along with amorphous carbon after treatment in Ar–Cl2–H2 gas mixtures at temperatures above 900 °C.


References

  1. Y. G. Gogotsi and M. Yoshimura, Nature (London), 1994, 367, 628 CrossRef CAS.
  2. Y. G. Gogotsi, M. Yoshimura, M. Kakihana, Y. Kanno and M. Shibuya, Ceram. Trans., 1995, 51, 243 Search PubMed.
  3. Y. G. Gogotsi, in Korrosion und Verschleiss von keramischen Werkstoffen, ed. R. Telle and P. Quirmbach, DKG, 1994, p. 114 Search PubMed.
  4. Y. G. Gogotsi, P. Kofstad, M. Yoshimura and K. G. Nickel, Diamond Relat. Mater., 1996, 5, 151 CrossRef CAS.
  5. Y. G. Gogotsi, K. G. Nickel and P. Kofstad, J. Mater. Chem., 1995, 5, 2313 RSC.
  6. M. J. McNallan, S. Y. Ip, S. Y. Lee and C. Park, Ceram. Trans., 1990, 10, 309 Search PubMed.
  7. W. S. Pan and A. J. Stekl, J. Electrochem. Soc., 1990, 137, 212 CAS.
  8. M. Balooch and D. R. Olander, Surf. Sci., 1992, 126, 321 CrossRef.
  9. K. J. Grannen and R. P. H. Chang, J. Mater. Res., 1994, 9, 2154 CAS.
  10. D. Roy, P. Ravindrananthan and A. Badzian, J. Mater. Res., 1996, 5, 1164.
  11. S. Y. Ip, M. J. McNallan and M. E. Schreiner, Ceram. Trans., 1989, 2, 289 Search PubMed.
  12. D. S. Park, M. J. McNallan, C. Park and W. W. Liang, J. Am. Ceram. Soc., 1990, 73, 1323 CAS.
  13. E. Marra, R. Kreidler, N. S. Jacobson and D. S. Fox, J. Am. Ceram. Soc., 1988, 71, 1067.
  14. M. Gorman and S. A. Solin, Solid State Commun., 1974, 51, 761 CrossRef.
  15. R. J. Nemanich, J. T. Glass, G. Lucovsky and R. E. Shroder, J. Vac. Sci. Technol. A, 1988, 6, 1783 CrossRef CAS.
  16. Y. G. Gogotsi, K. G. Nickel, D. Bahloul-Hourlier, T. Merle-Mejean, G. E. Khomenko and K. P. Skjerlie, J. Mater. Chem., 1996, 6, 595 RSC.
  17. I. D. Jeon, M. J. McNallan and Y. Gogotsi, Fundamental Aspects of High Temperature Corrosion VI, ed. D. A. Shores, R. Rapp and P. Hou, Proceedings of 190th ECS Meeting, San Antonio, TX, Oct. 1996, pp. 256–268 Search PubMed.
  18. J. E. Marra, E. C. Kreidler, N. S. Jacobson and D. S. Fox, J. Electrochem. Soc., 1988, 135, 1571 CAS.
  19. S. Knight and W. B. White, J. Mater. Res., 1989, 4, 385 CrossRef CAS.
  20. F. Tuinstra and J. L. Koenig, J. Chem. Phys., 1970, 53, 1126 CrossRef CAS.
  21. V. D. Andreev, T. A. Nachalnaya and E. V. Gabrusenok, Sverkhtverd. Mater., 1993, 2, 11 Search PubMed (in Russian).
  22. H. Eto, Y. Tamon, Y. Ohsawa and N. Kikuchi, Diamond Relat. Mater., 1994, 1, 373 CrossRef.
  23. V. McEnaney and T. Y. Mays, Introduction to Carbon Science, ed. H. Marsh, Butterworths, 1989, pp. 154–196 Search PubMed.
  24. E. D. Obraztsova, in Nanophase Materials, ed. G. C. Hadjipanayis and R. W. Siegel, Kluwer, Dortmund 1994, pp. 483–492 Search PubMed.
  25. H. Huang and N. Ghoniem, J. Nucl. Mater., 1994, 212–215, 148 CrossRef CAS.
  26. J. M. Lannon Jr., J. S. Gold and C. D. Stinespring, J. Appl. Phys., 1995, 77, 3823 CrossRef.
  27. W. Yarbrough, J. Am. Ceram. Soc., 1992, 75, 3179 CAS.
  28. B. V. Spitsyn and B. V. Deryagin, Authors certificate SU 339134, A Technique of Diamond Growth on Diamond's Face, 1956 Search PubMed.
  29. B. V. Spitsyn, in Handbook of Crystal Growth, ed. D. T. J. Hurle, Elsevier, Amsterdam, 1994, pp. 401–456 Search PubMed.
  30. R. H. Jones, C. H. Schilling and L. H. Schoenlein, Mater. Sci. Forum, 1989, 46, 277–308 Search PubMed.
Click here to see how this site uses Cookies. View our privacy policy here.