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DOI: 10.1039/A606524D (Paper) Reference Section for: J. Mater. Chem., 1997, 7, 637-640

Si/C phases from the IR laser-induced decomposition of 1,4-disilabutane

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Elvira A. Volnina, Jaroslav Kupčík, Zdeněk Bastl, Jan Šubrt, Leonid E. Gusel’nikov and Josef Pola

Abstract

CO2 laser-induced decomposition of 1,4-disilabutane (DSB) in the gas phase yields gaseous C1–2 hydrocarbons and RSiH3 compounds (R=H, CH3 , C2H5 and C2H3), and it represents a convenient process for chemical vapour deposition of thin films composed of Si/C/H, Si/C and Si components.

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