Characteristic and continuous fluorescence correction for electron probe microanalysis of thin coatings at oblique incidence

Abstract

A theoretical approach to characteristic and continuous fluorescence correction for electron probe microanalysis of thin coatings is presented. Calculations are developed for different systems of films on substrates at electron energies in the range 10–60 keV and incidence angles of 0–60°. Comparisons with experimental results are also made. It is shown that these corrections may reach 30% or more when the primary beam energy is increased and decrease significantly when the incidence angle is increased.