Vapour-phase synthesis of titanium nitride powder

Abstract

Titanium nitride powder has been synthesized using titanium tetrachloride, ammonia and hydrogen. The influence of the reaction temperature on stoichiometry, particle size and production rate in the gas phase has been investigated. Crystalline titanium nitride powders were formed in all cases. The observed lattice parameter of the powders as a function of reaction temperature suggests that only at high reaction temperatures can a stoichiometric titanium nitride powder be formed. In the temperature range 900–1173 K the mean primary particle size varies between 100 and 200 nm, and the geometric standard deviation varies between 1.1 and 1.3 for the powders formed below a reaction temperature of 1173 K. A significantly smaller primary particle size is observed at higher reaction temperatures. A fractal dimension analysis indicates that at low reaction temperatures the powders are not agglomerated.