A comparison of the secondary ion mas spectra obtained and the surface damage caused by ion and atom bombardment of polystyrene and niobium pentoxide shows that ion bombardment causes significantly more disruption for the surface structure of low conductivity materials than does atom bombardment.
A. Brown, J. A. van den Berg and J. C. Vickerman, J. Chem. Soc., Chem. Commun., 1984, 1684 DOI: 10.1039/C39840001684
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