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Title: Fabrication of Sub-3 nm Feature Size Based on Block Copolymer Self-Assembly for Next-Generation Nanolithography
Source:

Macromolecules [0024-9297] Kwak, Jongheon yr:2017 vol:50 iss:17 pg:6813 -6818

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  Available from 1996/01/01 volume: 29 issue:1
 


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