Jump to main content
Jump to site search
PLANNED MAINTENANCE Close the message box

Scheduled maintenance work on Wednesday 21st October 2020 from 07:00 AM to 07:00 PM (BST).

During this time our website performance may be temporarily affected. We apologise for any inconvenience this might cause and thank you for your patience.


Issue 84, 2016, Issue in Progress
Previous Article Next Article

Synthesis and fidelity study of ultraviolet-curable hydrogen silsesquioxane analogue as an elastomeric stamp

Author affiliations

Abstract

An analogue of hydrogen silsesquioxane (HSQ) with an epoxy-terminated inorganic polydimethylsiloxane spacer at tethered positions was prepared as a stamp for soft lithography. Nuclear magnetic resonance (NMR) spectroscopy and wide angle X-ray diffraction (WAXD) results proved the existence of a crystallite cage silsesquioxane structure embedded in an amorphous matrix. The fluid analogue was ultra-violet cured whose curing characteristic was closely related to catalyst concentration, post-bake time, and post-bake temperature. Spectroscopic analysis showed that the pattern was successfully replicated onto the HSQ analogue surface with high fidelity down to the sub-micron scale. The electron beam dosages affect the features of the replicated soft mould. The surface profile and roughness were almost identical between the hard and soft mould leading to a respectable surface roughness (Ra and Rq) of 3.0–4.5 nm and aspect ratio as high as 7.5. Synergistic effect of the rigid cage structure of silsesquioxane with a flexible organic spacer offers an efficient master mould filling.

Graphical abstract: Synthesis and fidelity study of ultraviolet-curable hydrogen silsesquioxane analogue as an elastomeric stamp

Back to tab navigation

Article information


Submitted
20 Jun 2016
Accepted
12 Aug 2016
First published
26 Aug 2016

RSC Adv., 2016,6, 81364-81371
Article type
Paper

Synthesis and fidelity study of ultraviolet-curable hydrogen silsesquioxane analogue as an elastomeric stamp

M. R. Ramli, R. Ramli, K. Mohamed and Z. Ahmad, RSC Adv., 2016, 6, 81364
DOI: 10.1039/C6RA15947H

Social activity

Search articles by author

Spotlight

Advertisements