Issue 26, 2016
From the journal:

RSC Advances

Fabrication of porous silicon-based optical sensors using metal-assisted chemical etching†

R. F. Balderas-Valadez,a   V. Agarwala  and  C. Pacholski‡*b  

* Corresponding authors

a CIICAp, UAEM, Av. Universidad 1001 Col. Chamilpa, Cuernavaca, Morelos 62210, Mexico

b Department of New Materials and Biosystems, Max Planck Institute for Intelligent Systems, Heisenbergstr. 3, 70569 Stuttgart, Germany
E-mail: Pacholski@is.mpg.de

Abstract

Optical biosensors based on porous silicon were fabricated by metal assisted chemical etching. Thereby double layered porous silicon structures were obtained consisting of porous pillars with large pores on top of a porous silicon layer with smaller pores. These structures showed a similar sensing performance in comparison to electrochemically produced porous silicon interferometric sensors.

Graphical abstract: Fabrication of porous silicon-based optical sensors using metal-assisted chemical etching

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Article information

DOI
https://doi.org/10.1039/C5RA26816H
Article type
Communication
Submitted
15 Dec 2015
Accepted
17 Feb 2016
First published
17 Feb 2016
This article is Open Access
Creative Commons BY-NC license

RSC Adv., 2016,6, 21430-21434

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Fabrication of porous silicon-based optical sensors using metal-assisted chemical etching

R. F. Balderas-Valadez, V. Agarwal and C. Pacholski, RSC Adv., 2016, 6, 21430 DOI: 10.1039/C5RA26816H

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