Orientation-controlled BaTiO3 thin films fabricated by chemical solution deposition

Abstract

We synthesized orientation-controlled (100), (110), and (111) BaTiO₃ films by the chemical solution deposition method. The electric properties of the fabricated BaTiO₃ thin films were evaluated, and dielectric constants of 2000 were found for the (110)-oriented and (111)-oriented BaTiO₃ film, with temperature dependence stabilized from 20 °C to 150 °C.