Issue 7, 2014

Water assisted oxygen absorption on the instability of amorphous InAlZnO thin-film transistors

Abstract

Stability of amorphous InAlZnO thin-film transistors was investigated under vacuum conditions and an oxygen atmosphere with different rates of relative humidity. The mechanism of water assisted oxygen absorption on the back channel is proposed to explain the phenomenon that wet oxygen leads to a larger positive threshold voltage (Vth) shift than dry oxygen.

Graphical abstract: Water assisted oxygen absorption on the instability of amorphous InAlZnO thin-film transistors

Article information

Article type
Communication
Submitted
20 Aug 2013
Accepted
22 Oct 2013
First published
23 Oct 2013

RSC Adv., 2014,4, 3145-3148

Water assisted oxygen absorption on the instability of amorphous InAlZnO thin-film transistors

J. Zhang, X. Li, J. Lu, N. Zhou, P. Guo, B. Lu, X. Pan, L. Chen and Z. Ye, RSC Adv., 2014, 4, 3145 DOI: 10.1039/C3RA44513E

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