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Issue 7, 2019
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Fabrication of multi-material 3D structures by the integration of direct laser writing and MEMS stencil patterning

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Abstract

The construction of a complex, 3D optical metamaterial challenges conventional nanofabrication techniques. These metamaterials require patterning of both a deformable mechanical substrate and an optically-active structure with ∼200 nm resolution and precision. The soft nature of the deformable mechanical materials often precludes the use of resist-based techniques for patterning. Furthermore, FIB deposition approaches produce metallic structures with considerable disorder and impurities, impairing their optical response. In this paper we discuss a novel solution to this nanofabrication challenge – the integration of direct laser writing and MEMS stencil patterning. We demonstrate a variety of methods that enable this integration and then show how one can produce optically-active, 3D metamaterials. We present optical characterization data on one of these metamaterials to demonstrate the viability of our nanofabrication approach.

Graphical abstract: Fabrication of multi-material 3D structures by the integration of direct laser writing and MEMS stencil patterning

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Publication details

The article was received on 13 Nov 2018, accepted on 16 Jan 2019 and first published on 04 Feb 2019


Article type: Paper
DOI: 10.1039/C8NR09174A
Citation: Nanoscale, 2019,11, 3261-3267
  • Open access: Creative Commons BY-NC license
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    Fabrication of multi-material 3D structures by the integration of direct laser writing and MEMS stencil patterning

    J. B. Reeves, R. K. Jayne, L. Barrett, A. E. White and D. J. Bishop, Nanoscale, 2019, 11, 3261
    DOI: 10.1039/C8NR09174A

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