Jump to main content
Jump to site search

Issue 11, 2020

Nano-LED induced chemical reactions for structuring processes

Author affiliations

Abstract

We present a structuring technique based on the initialization of chemical reactions by an array of nano-LEDs which is used in the near-field as well as in the far-field regime. In the near-field regime, we demonstrate first results with the nano-LED array for lithography using the photoresist DiazoNaphthoQuinone-(DNQ)-sulfonate for the fabrication of holes in the resist down to ∼75 nanometres in diameter. In contrast, the nano-LEDs can also be employed in the far-field regime to expose thin films of the monomer bisphenol A-glycidyl methacrylate (Bis-GMA) and to initialize polymerization locally. Photosensitive films were patterned and spherical cone-shaped three dimensional objects with diameters ranging from ∼480 nm up to 20 micrometres were obtained. The modification in the material as a result of the photochemical reaction induced i.e. by polymerization was confirmed by Raman spectroscopy. This structuring maskless technique has the potential to induce substantial changes in photosensitive molecules and to produce the desired structures from the tens of microns down to the nanometre scale.

Graphical abstract: Nano-LED induced chemical reactions for structuring processes

Article information


Submitted
04 Jun 2020
Accepted
19 Oct 2020
First published
20 Oct 2020

This article is Open Access

Nanoscale Adv., 2020,2, 5421-5427
Article type
Paper

Nano-LED induced chemical reactions for structuring processes

M. Mikulics, Z. Sofer, A. Winden, S. Trellenkamp, B. Förster, J. Mayer and H. H. Hardtdegen, Nanoscale Adv., 2020, 2, 5421 DOI: 10.1039/D0NA00851F

This article is licensed under a Creative Commons Attribution 3.0 Unported Licence. You can use material from this article in other publications without requesting further permissions from the RSC, provided that the correct acknowledgement is given.

Read more about how to correctly acknowledge RSC content.


Social activity

Search articles by author

Spotlight

Advertisements