Issue 16, 2011
From the journal:

Lab on a Chip

Metal microelectromechanical oscillator exhibiting ultra-high water vapor resolution

J. Verd,*a   M. Sansa,b   A. Uranga,c   F. Perez-Murano,b   J. Seguraa  and  N. Barniolc  

* Corresponding authors

a Department of Physics, Universitat de les Illes Balears, Palma (Illes Balears), Spain
E-mail: jaume.verd@uib.es

b Institut de Microelectrònica de Barcelona, CNM-CSIC, Bellaterra, Barcelona, Spain

c Department of Electronic Engineering, Universitat Autònoma de Barcelona, Bellaterra, Barcelona, Spain

Abstract

Water vapor sensing characterization of a metal resonator fabricated with an industrial 0.35 μm CMOS technology is reported. The resonator frequency is ∼13.2 MHz and exhibits a sensitivity magnitude of ∼3.5 kHz per %RH without requiring any additional hygroscopic coating layer. An on-chip integrated oscillator circuit enables an unprecedented resolution of 0.005 %RH.

Graphical abstract: Metal microelectromechanical oscillator exhibiting ultra-high water vapor resolution

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Article information

DOI
https://doi.org/10.1039/C1LC20103D
Article type
Communication
Submitted
04 Feb 2011
Accepted
27 Jun 2011
First published
11 Jul 2011

Lab Chip, 2011,11, 2670-2672

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Metal microelectromechanical oscillator exhibiting ultra-high water vapor resolution

J. Verd, M. Sansa, A. Uranga, F. Perez-Murano, J. Segura and N. Barniol, Lab Chip, 2011, 11, 2670 DOI: 10.1039/C1LC20103D

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