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Issue 15, 2011
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An embedded microchannel in a MEMS plate resonator for ultrasensitive mass sensing in liquid

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Abstract

A mass sensor innovative concept is presented here, based on a hollow plate Micro Electro Mechanical System (MEMS) resonator. This approach consists in running a solution through an embedded microchannel, while the plate resonator is actuated according to a Lamé-mode by electrostatic coupling in dry environment. The experimental results have shown a clear relationship between the measured shift of the resonance frequency and the sample solution density. Additionally, depending on the channel design and the solution properties, the quality factor (Q-factor) was noticed maintaining its level and even substantial improvement in particular cases. Resonators demonstrate resonance frequencies close to 78 MHz and Q-factor of a few thousands for liquid phase detection operating at ambient temperature and atmospheric pressure. Frequency fluctuations study revealed a 13 Hz instability level, equivalent to 1.5 fg in mass. Using a fully electronic readout configuration, a mass responsivity of ca. 850 fg kHz−1 was monitored.

Graphical abstract: An embedded microchannel in a MEMS plate resonator for ultrasensitive mass sensing in liquid

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Publication details

The article was received on 07 Jan 2011, accepted on 11 May 2011 and first published on 10 Jun 2011


Article type: Paper
DOI: 10.1039/C1LC20011A
Lab Chip, 2011,11, 2598-2603

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    An embedded microchannel in a MEMS plate resonator for ultrasensitive mass sensing in liquid

    V. Agache, G. Blanco-Gomez, F. Baleras and P. Caillat, Lab Chip, 2011, 11, 2598
    DOI: 10.1039/C1LC20011A

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