Issue 1, 2008

Nanochannels in SU-8 with floor and ceiling metal electrodes and integrated microchannels

Abstract

Sacrificially etched 2-D nanofluidic channels and nanospaces with integrated floor and ceiling electrodes and arbitrary channel geometries have been demonstrated with channel heights from 20 nm to 400 nm, widths from 800 nm to 40 µm, and lengths up to 3 mm, using SU-8 as the channel structural material.

Graphical abstract: Nanochannels in SU-8 with floor and ceiling metal electrodes and integrated microchannels

Article information

Article type
Technical Note
Submitted
11 Jun 2007
Accepted
18 Oct 2007
First published
08 Nov 2007

Lab Chip, 2008,8, 173-175

Nanochannels in SU-8 with floor and ceiling metal electrodes and integrated microchannels

K. P. Nichols, J. C. T. Eijkel and H. J. G. E. Gardeniers, Lab Chip, 2008, 8, 173 DOI: 10.1039/B715917J

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