Issue 12, 2007
From the journal:

Lab on a Chip

Microfabrication of cavities in polydimethylsiloxane using DRIE silicon molds

Ut-Binh T. Giang,a   Dooyoung Lee,b   Michael R. Kingab  and  Lisa A. DeLouise*ac  

* Corresponding authors

a Department of Biomedical Engineering, University of Rochester, RC Box 270168, Goergen Hall, Rochester, NY 14627, USA.

b Department of Chemical Engineering, University of Rochester, 206 Gavett Hall, RC 270166, Rochester, NY 14627, USA.

c Department of Dermatology, University of Rochester School of Medicine and Dentistry, 601 Elmwood Ave., Rochester, NY 14642, USA.
E-mail: lisa_delouise@urmc.rochester.edu

Abstract

We present a novel method to create cavities in PDMS that is simple and exhibits wide process latitude allowing control over the radius of curvature to form shallow concave pits or deep spherical cavities.

Graphical abstract: Microfabrication of cavities in polydimethylsiloxane using DRIE silicon molds

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Article information

DOI
https://doi.org/10.1039/B714742B
Article type
Communication
Submitted
25 Sep 2007
Accepted
05 Oct 2007
First published
12 Oct 2007

Lab Chip, 2007,7, 1660-1662

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Microfabrication of cavities in polydimethylsiloxane using DRIE silicon molds

U. T. Giang, D. Lee, M. R. King and L. A. DeLouise, Lab Chip, 2007, 7, 1660 DOI: 10.1039/B714742B

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