Porous silicon microspheres: synthesis, characterization and application to photonic microcavities

Abstract

Porous silicon microspheres have been synthesized by chemical vapour deposition of disilane gas. Their spectral signatures are similar to those of electrochemically grown porous silicon, in particular they yield photoluminescence and they show an oxidation behaviour upon their exposure to the open air. The particles are highly spherical and poly-disperse in size with diameters of approximately 0.5 to 5 micrometres, and they have a very smooth surface. Because of these reasons they work as optical microcavities with well defined resonating Mie modes. These modes have been identified in the near-infrared range. They blue-shift considerably whenever the microspheres are in contact with air because of the aforementioned oxidation process.