Structure and growth characteristics of BaZrO3 films produced using an electrostatic assisted aerosol-gel deposition method

Abstract

BaZrO ₃ films have been fabricated using an electrostatic assisted aerosol-gel deposition (EAAD) method. The precursor was synthesised by reacting barium with 2-methoxyethanol and then mixed with zirconium n-propoxide in 2-methoxyethanol solvent. The aerosol was generated by electrostatic atomisation. The results showed that the aerosol was an oxo-alkoxide complex which transformed to BaZrO ₃ at temperatures above 800 °C with some BaCO ₃ formed as an intermediate product. Amorphous aerosol-gel films were deposited at an optimum temperature of 400 °C. Crystalline BaZrO ₃ films could be produced by repeating the deposition and heat-treatment at 800 °C.