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Issue 9, 2017

Real-time depth measurement in glow discharge optical emission spectrometry via differential interferometric profiling

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Abstract

We developed an in situ measurement technique implemented on a Glow Discharge Optical Emission Spectrometry (GD-OES) instrument, which provides the depth information during the profiling process. The setup is based on a differential interferometer, and we show that a measurement accuracy better than 5% can be obtained for crater depths ranging from 100 nanometers to several tens of micrometers. This development can be directly applied to non-transparent coatings, and brings significant improvement to the quantification process in GD-OES.

Graphical abstract: Real-time depth measurement in glow discharge optical emission spectrometry via differential interferometric profiling

Article information


Submitted
13 Apr 2017
Accepted
21 Jun 2017
First published
21 Jun 2017

J. Anal. At. Spectrom., 2017,32, 1798-1804
Article type
Paper

Real-time depth measurement in glow discharge optical emission spectrometry via differential interferometric profiling

S. Gaiaschi, S. Richard, P. Chapon and O. Acher, J. Anal. At. Spectrom., 2017, 32, 1798 DOI: 10.1039/C7JA00146K

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