Development of laboratory confocal 3D-XRFspectrometer and nondestructive depth profiling

Abstract

The present paper reports on the laboratory 3D-XRF results applied to industrial and environmental samples. The feasibility of confocal 3D-XRF analysis was characterized with regard to the depth resolution and depth sensitivity. To investigate the depth sensitivity of the confocal 3D-XRF analysis, the multilayered plastic reference samples were prepared by using a spin coating method. It was confirmed that these plastic layered reference materials were useful for evaluating the analytical performance of confocal 3D-XRF. In addition, many applications of 3D-XRF to industrial plastics, chemical microchip, and biological samples were demonstrated under the confocal XRF configuration.