Design and evaluation of dual inlet ICP torch for low gas consumption†
Abstract
In this study, we concentrated on improving the vortex flow uniformity, which was considered as a key factor for our new ICP torch design. To obtain a uniform vortex flow with lower plasma gas consumption, our new ICP torch had a dual gas inlet, and convertibility for helium and argon ICP. With this modification, helium ICP was able to operate with a 10–20% lower plasma gas flow rate than our previous torch. To confirm the effects of the dual inlet, the flows were compared using a high-speed video system, and the noise-power spectra of the emission line