New trends in elemental analysis using X-ray fluorescence spectrometry

Abstract

X-ray fluorescence spectrometry is now a widely applied and mature method for elemental analysis whereas electron probe microanalysis has become an established reference technique. This review places emphasis on new trends in the instrumentation, such as improved energy dispersive detectors and layered synthetic microstructures for wavelength dispersive analysis. After a discussion on new methodologies for sensitive analysis, such as total reflection X-ray fluorescence analysis and methods relying on synchrotron radiation sources, developments in spectrum deconvolution and matrix correction software are described.