Processing of dielectric oxynitride perovskites for powders, ceramics, compacts and thin films

Abstract

Oxynitride perovskites, having oxide and nitride anions together in a compound, are a new class of dielectric material. The shaping process in either bulk ceramics or thin films is an essential factor for investigating and utilizing the dielectric properties of these materials. In this perspective, recent studies on the shaping of dielectric oxynitride perovskites are reviewed with a consideration of the powder preparation and thermal stability for sintering, several sintering methods, ultra-high pressure compaction, and thin-film formation.