Issue 28, 2022

Facet-dependent electrical conductivity properties of a 4H-SiC wafer

Abstract

Intrinsic {0001} 4H-SiC wafer cut to expose {10[1 with combining macron]0} and {1[2 with combining macron]10} side faces allows for conductivity measurements on different crystal surfaces. The wafer has a band gap of 3.20 eV. Its {0001} face gives a strong emission band at 384 nm, but the {10[1 with combining macron]0} face is barely emissive. The {0001} face is also highly electrically conductive. The {10[1 with combining macron]0} and {1[2 with combining macron]10} faces show similar but comparatively less conductivity than the {0001} face. Clean current-rectifying IV curves are obtained for the {0001}/{10[1 with combining macron]0} facet combination, so novel transistors can be fabricated using the electrical facet effect. Moreover, the SiC wafer displays clear photoconductivity properties.

Graphical abstract: Facet-dependent electrical conductivity properties of a 4H-SiC wafer

Supplementary files

Article information

Article type
Paper
Submitted
13 May 2022
Accepted
21 Jun 2022
First published
21 Jun 2022

J. Mater. Chem. C, 2022,10, 10424-10428

Facet-dependent electrical conductivity properties of a 4H-SiC wafer

G. Kumar, J. Chen, H. Ma, X. Huang and M. H. Huang, J. Mater. Chem. C, 2022, 10, 10424 DOI: 10.1039/D2TC01981G

To request permission to reproduce material from this article, please go to the Copyright Clearance Center request page.

If you are an author contributing to an RSC publication, you do not need to request permission provided correct acknowledgement is given.

If you are the author of this article, you do not need to request permission to reproduce figures and diagrams provided correct acknowledgement is given. If you want to reproduce the whole article in a third-party publication (excluding your thesis/dissertation for which permission is not required) please go to the Copyright Clearance Center request page.

Read more about how to correctly acknowledge RSC content.

Social activity

Spotlight

Advertisements