Recent progress in piezoelectric thin film fabrication via the solvothermal process

Abstract

The solvothermal process, a relatively simple process, has been regarded as one of the most attractive and promising film preparation methods. The prepared thin films do not need to be treated with high temperature, and this process has been widely applied in the fields of piezoelectric, ferroelectric and oxide thin films. In the present review, the development of piezoelectric thin films fabricated by the solvothermal process is introduced from the aspects of film fabrication technologies, devices and characteristics. The research comprehensively introduces the results and progress, including for 5 types of piezoelectric thin films related to BaTiO₃, (K,Na)NbO₃, PbTiO₃ and Pb(Zr,Ti)O₃, composite solid solutions and ZnO, and predicts the development prospects for the solvothermal process in piezoelectric film fabrication. Finally, the review projects the prospects for doped piezoelectric film fabrication in terms of the selection of the substrate and the preparation of doped piezoelectric ceramics.