High-performance BaZr0.35Ti0.65O3 thin film capacitors with ultrahigh energy storage density and excellent thermal stability

Abstract

The ability to work at ultralow (−90 °C) or ultrahigh (200 °C) temperature with superior energy storage properties is essential for dielectric capacitors to operate in harsh environments. Here, we realized an ultrahigh recoverable energy density (W_rec) (78.7 J cm⁻³) and efficiency (η) (80.5%) in BaZr_0.35Ti_0.65O₃ film capacitors through enhancing the breakdown electric field strength at room temperature. Moreover, the BaZr_0.35Ti_0.65O₃ film capacitor exhibits great energy storage properties when measured from −150 °C to 200 °C. W_rec and η can reach the value of 41.9 J cm⁻³ and 66.4% under an electric strength of 4.0 MV cm⁻¹ even at 200 °C, respectively. Especially, the variation of both W_rec and η at 200 °C during 1 × 10⁶ cycles (ferroelectric fatigue tests) is less than 3%. All these reveal that the BZT film capacitor is a commendable material for application in equipment working in harsh environments.