Issue 27, 2018, Issue in Progress

Correction: EUV photofragmentation study of hybrid nonchemically amplified resists containing antimony as an absorption enhancer

Abstract

Correction for ‘EUV photofragmentation study of hybrid nonchemically amplified resists containing antimony as an absorption enhancer’ by Cleverson Alves da Silva Moura et al., RSC Adv., 2018, 8, 10930–10938.

Associated articles

Article information

Article type
Correction
Submitted
11 Apr 2018
Accepted
11 Apr 2018
First published
20 Apr 2018
This article is Open Access
Creative Commons BY license

RSC Adv., 2018,8, 15029-15029

Correction: EUV photofragmentation study of hybrid nonchemically amplified resists containing antimony as an absorption enhancer

C. A. D. S. Moura, G. K. Belmonte, P. G. Reddy, K. E. Gonsalves and D. E. Weibel, RSC Adv., 2018, 8, 15029 DOI: 10.1039/C8RA90030B

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