Selective through-holing of anodic porous alumina membranes with large area

Abstract

Anodic porous alumina membranes with site controlled through-holes were prepared by the formation of a masking layer on the surface of anodic porous alumina and subsequent selective second anodization in concentrated sulfuric acid to form a readily soluble layer. After the anodization, the residual Al substrate was removed, and the highly soluble alumina layer formed in concentrated sulfuric acid was dissolved selectively by wet etching. An advantageous point of this process is the controllability of the pattern of through-holes, and the preparation of large samples with selective through-holes is possible. The pattern of through-holes was controlled by changing the mask pattern formed on the surface of anodic porous alumina. The alumina membranes obtained by this process are expected to be used for various applications that require porous alumina membranes with site controlled through-holes.