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Issue 90, 2018
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Controllable conversion of liquid silicon from high-density to low-density towards amorphous silicon nanospheres on a wafer scale

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Abstract

High-density liquid (HDL) silicon can be converted via annealing in hydrogen into low-density liquid (LDL), surviving due to hydrogen protection. Amorphous silicon (a-Si) spheres on a wafer scale were achieved via an underlying transition from LDL silicon. The amorphous spheres were protected from crystallization due to the presence of hydrogen gas.

Graphical abstract: Controllable conversion of liquid silicon from high-density to low-density towards amorphous silicon nanospheres on a wafer scale

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Publication details

The article was received on 18 Jul 2018, accepted on 13 Sep 2018 and first published on 13 Sep 2018


Article type: Communication
DOI: 10.1039/C8CC05827J
Citation: Chem. Commun., 2018,54, 12694-12697

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    Controllable conversion of liquid silicon from high-density to low-density towards amorphous silicon nanospheres on a wafer scale

    Q. Liu, R. Qi, S. Song, Z. Yan and Q. Huang, Chem. Commun., 2018, 54, 12694
    DOI: 10.1039/C8CC05827J

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