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Issue 105, 2016, Issue in Progress
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Synthesis and material characterization of amorphous and crystalline (α-) Al2O3 via aerosol assisted chemical vapour deposition

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Abstract

The facile synthesis of Al2O3 in the amorphous and corundum phase on both glass and quartz substrates is reported. The synthesis was carried out via aerosol assisted chemical vapour deposition using Al(acac)3 and methanol. The films were analyzed using XRD, SEM, UV-vis spectroscopy and XPS. The coatings were highly crystalline (when annealed) with low carbon contamination levels and a relatively featureless morphology that gave rise to ultra high transparency in the UV, visible and near IR portions of the electromagnetic spectrum.

Graphical abstract: Synthesis and material characterization of amorphous and crystalline (α-) Al2O3 via aerosol assisted chemical vapour deposition

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Publication details

The article was received on 27 Sep 2016, accepted on 21 Oct 2016 and first published on 21 Oct 2016


Article type: Paper
DOI: 10.1039/C6RA24018F
Citation: RSC Adv., 2016,6, 102956-102960
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    Synthesis and material characterization of amorphous and crystalline (α-) Al2O3 via aerosol assisted chemical vapour deposition

    S. D. Ponja, I. P. Parkin and C. J. Carmalt, RSC Adv., 2016, 6, 102956
    DOI: 10.1039/C6RA24018F

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