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Issue 100, 2016
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Additive fabrication of nanostructures with focused soft X-rays

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Abstract

We report on a novel technique for the fabrication of metallic nanostructures via soft X-ray irradiation of precursor molecules supplied from the gas phase. With this technique we were able to produce localized Co nanostructures with a growth rate and purity competitive with electron beam induced deposition. We demonstrate that our approach exhibits significant selectivity with respect to incident photon energy leading to enhanced growth for resonant absorption energy of the precursor molecule. Based on this finding we propose a unique new pathway of selective deposition from precursor mixtures. Furthermore, we investigated the growth rate with respect to precursor pressure and growth time and discuss the potential resolution limits of this new technique.

Graphical abstract: Additive fabrication of nanostructures with focused soft X-rays

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Supplementary files

Article information


Submitted
17 Jul 2016
Accepted
10 Oct 2016
First published
11 Oct 2016

This article is Open Access

RSC Adv., 2016,6, 98344-98349
Article type
Paper

Additive fabrication of nanostructures with focused soft X-rays

A. Späth, F. Tu, F. Vollnhals, M. Drost, S. Krick Calderón, B. Watts, R. H. Fink and H. Marbach, RSC Adv., 2016, 6, 98344
DOI: 10.1039/C6RA18214C

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