Issue 100, 2016

Additive fabrication of nanostructures with focused soft X-rays


We report on a novel technique for the fabrication of metallic nanostructures via soft X-ray irradiation of precursor molecules supplied from the gas phase. With this technique we were able to produce localized Co nanostructures with a growth rate and purity competitive with electron beam induced deposition. We demonstrate that our approach exhibits significant selectivity with respect to incident photon energy leading to enhanced growth for resonant absorption energy of the precursor molecule. Based on this finding we propose a unique new pathway of selective deposition from precursor mixtures. Furthermore, we investigated the growth rate with respect to precursor pressure and growth time and discuss the potential resolution limits of this new technique.

Graphical abstract: Additive fabrication of nanostructures with focused soft X-rays

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Article information

Article type
17 Jul 2016
10 Oct 2016
First published
11 Oct 2016
This article is Open Access
Creative Commons BY license

RSC Adv., 2016,6, 98344-98349

Additive fabrication of nanostructures with focused soft X-rays

A. Späth, F. Tu, F. Vollnhals, M. Drost, S. Krick Calderón, B. Watts, R. H. Fink and H. Marbach, RSC Adv., 2016, 6, 98344 DOI: 10.1039/C6RA18214C

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