Fabrication of gold microstructures using negative photoresists doped with gold ions through two-photon excitation

Abstract

The fabrication of gold microstructures was investigated using a mixture of SU-8 and gold ions using two-photon excitation induced by a femtosecond laser. Energy dispersive X-ray spectrometry, micro-X-ray diffraction and X-ray photoelectron spectroscopy were performed to analyse the resulting microstructures. Electrical conductivity was also measured. Elemental analysis showed that the fabricated structures consisted of triangular, reduced gold crystals and small amounts of cross-linked SU-8. The conductivity of the fabricated structures was four orders of magnitude lower than that of pure gold because of the cross-linked SU-8 present in the material.