An old workhorse for new applications: Fe(dpm)3 as a precursor for low-temperature PECVD of iron(iii) oxide

Abstract

An iron(III) β-diketonate complex, Fe(dpm)₃ (Hdpm = 2,2,6,6-tetramethyl-3,5-heptanedione), has been investigated as a potential precursor for plasma enhanced chemical vapor deposition (PECVD) of iron(III) oxide nanomaterials. Thanks to the combined experimental–theoretical approach, spectroscopic properties, spin state, thermal behavior and fragmentation pathways of Fe(dpm)₃ have been carefully analysed, obtaining an excellent agreement between simulation and experiment. Preliminary PECVD tests evidenced the possibility of obtaining pure and homogeneous Fe₂O₃ deposits with controlled nano-organization at temperatures as low as 100 °C, even on flexible plastic substrates. The present results open up intriguing perspectives for the exploitation of Fe(dpm)₃ as an efficient molecular source for the preparation of nanostructured iron(III) oxides to be used in energetics and gas sensing applications.