Improvement of bias stability of oxyanion-incorporated aqueous sol–gel processed indium zinc oxide TFTs

Abstract

Oxyanion-incorporated indium zinc oxide (IZO) TFTs exhibiting excellent bias stabilities are fabricated from aqueous IZO precursor solutions blended with a catalytic amount of inorganic acids (H₂SO₄, H₃PO₄, H₃BO₃). The resulting oxyanion-incorporated IZO TFTs (SO–IZO, PO–IZO, BO–IZO) exhibit improved bias stabilities under NBS, PBS, NBTS, and PBTS conditions.