Fabrication of 3D ZnO hollow shell structures by prism holographic lithography and atomic layer deposition

Abstract

Highly uniform 3D ZnO hollow shell structures were prepared by combining prism holographic lithography (PHL) and atomic layer deposition (ALD). As a dense ZnO film was obtained by using the ALD process, no volume shrinkage occurred during the subsequent calcination to remove the sacrificial polymer template. No volume shrinkage during heat treatment is crucial for achieving excellent optical properties and mechanical stability of inverse photonic crystals (PCs).