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Issue 92, 2014
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Performance enhancement of humidity sensors made from oxide heterostructure nanorods via microstructural modifications

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Abstract

We reported the fabrication of a highly sensitive and fast switchable humidity sensor based on ZnO–TiO2 core–shell nanorods that were synthesized using hydrothermal solution and atomic layer deposition. These nanorods were thermally treated under various physical conditions to improve their sensing performance. The structural investigation revealed that the crystal and microstructure changed with the thermal treatment. Notably, the amorphous TiO2 shell layer transformed into various degrees of crystalline phase after annealing in air and a vacuum at 400 °C. Furthermore, the responses of the sensors fabricated from the ZnO–TiO2 nanorods, with and without thermal annealing, to relative humidity (RH) changes were proportional with the increase in humidity. Among various samples, ZnO–TiO2 nanorods thermally treated in a vacuum exhibited the highest humidity selectivity in response to the cyclic changes in humidity from 11% RH to 33–95% RH at room temperature. Possible mechanisms for the enhancement of sensor performance have been discussed based on structural modifications caused by the thermal treatments.

Graphical abstract: Performance enhancement of humidity sensors made from oxide heterostructure nanorods via microstructural modifications

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Publication details

The article was received on 04 Jun 2014, accepted on 30 Sep 2014 and first published on 03 Oct 2014


Article type: Paper
DOI: 10.1039/C4RA05301J
Citation: RSC Adv., 2014,4, 50866-50872

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    Performance enhancement of humidity sensors made from oxide heterostructure nanorods via microstructural modifications

    Y. Liang, W. Liao and S. Liu, RSC Adv., 2014, 4, 50866
    DOI: 10.1039/C4RA05301J

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