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Issue 13, 2014
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A combined approach to predict spatial temperature evolution and its consequences during FIB processing of soft matter

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Abstract

Accessing local temperatures and their evolution during focused ion beam (FIB) processing is of particular importance in the context of polymers or biomaterials as they tend to undergo severe chemical and morphological damage due to the high temperatures arising. In this study we present a combination of ion trajectory simulations and thermal spike model based calculations, which allows predicting local temperatures, lateral distributions and evolution during FIB patterning. Simulations and calculations have been done without any approximation or correction factors and lead to results in very good agreement with experiments on polymers taking into account their thermal behaviour. Finally, the model is applied to different scanning strategies which demonstrate how classically applied patterning strategies lead to massive temperature increases which can be the knock out criteria for low melting materials.

Graphical abstract: A combined approach to predict spatial temperature evolution and its consequences during FIB processing of soft matter

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Publication details

The article was received on 17 Dec 2013, accepted on 03 Feb 2014 and first published on 06 Feb 2014


Article type: Paper
DOI: 10.1039/C3CP55308F
Citation: Phys. Chem. Chem. Phys., 2014,16, 6153-6158

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    A combined approach to predict spatial temperature evolution and its consequences during FIB processing of soft matter

    R. Schmied, J. E. Fröch, A. Orthacker, J. Hobisch, G. Trimmel and H. Plank, Phys. Chem. Chem. Phys., 2014, 16, 6153
    DOI: 10.1039/C3CP55308F

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