Issue 3, 2013

A novel Surface Tension Assisted Lithography (STAL) technique for microfabrication of 3D structures

Abstract

A novel Surface Tension Assisted Lithography (STAL) technique is proposed to fabricate 3D structures in the photo-patternable polymer, SU-8, using a sequence of soft-imprint lithography, photo-lithography, and polymer reflow. The dimensions of the reflowed 3D structures are controlled by the volume of material initially displaced by soft-imprinting, and the lateral dimensions of the reflow container, defined by photo-lithography.

Graphical abstract: A novel Surface Tension Assisted Lithography (STAL) technique for microfabrication of 3D structures

Article information

Article type
Communication
Submitted
29 Oct 2012
Accepted
13 Nov 2012
First published
13 Nov 2012

J. Mater. Chem. C, 2013,1, 401-405

A novel Surface Tension Assisted Lithography (STAL) technique for microfabrication of 3D structures

M. Nasabi, F. J. Tovar-Lopez, K. Khoshmanesh, G. Kostovski and A. Mitchell, J. Mater. Chem. C, 2013, 1, 401 DOI: 10.1039/C2TC00516F

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