How do the electron beam writing and metal deposition affect the properties of graphene during device fabrication?
Abstract
Electron beam exposure and metallic contact formation are commonly used processes for fabrication of
* Corresponding authors
a
Division of Physics and Applied Physics, School of Physical and Mathematical Sciences, Nanyang Technological University, 637371 Singapore, Singapore
E-mail:
yuting@ntu.edu.sg
b Department of Physics, Faculty of Science, National University of Singapore, 117542 Singapore, Singapore
c Graphene Research Center, Faculty of Science, National University of Singapore, 117546 Singapore, Singapore
Electron beam exposure and metallic contact formation are commonly used processes for fabrication of
X. Shen, H. Wang and T. Yu, Nanoscale, 2013, 5, 3352 DOI: 10.1039/C3NR33460K
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