A post silicon-on-insulator compatible smart tube technology

Abstract

This paper reports a technology to fabricate micro-parylene tubes with integrated sensors. The unique advantage of this new technology is its ability to incorporate high-temperature solid-state materials. Standard CMOS and MEMS devices can be fabricated first on the silicon wafers and then the smart tubes are formed by taking advantage of XeF₂ isotropic silicon etching and conformal parylene coating.