The binary alloy system SixGe1−x provides a continuous series of materials with gradually varying properties. In this paper, we report on a fundamental basis a method to make large-area macroporous SixGe1−x films with variable Ge content by electrodeposition in an ionic liquid, with SiCl4 and GeCl4 as precursors. The chemical composition of the products can be modified by changing the molar ratio of the precursors. Periodical macroporous SixGe1−x was made by a multilayer polystyrene (PS) template assembled as face-centered cubic lattice. Two-dimensional (2-D) SixGe1−x bowl-like and fishing-net structures can be obtained by applying different deposition temperatures. The results highlight the potential applications, including photonic bandgap and battery materials, as well as ultra-thin gratings, due to the effect of modification of light and improved tunability of composition, although SixGe1−x made by our method is sensitive to oxidation by air.
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