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Issue 46, 2013
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Continuous composition spread using pulsed-laser deposition with a single segmented target

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Abstract

The exploration and optimization of new material classes have been considerably accelerated and made highly efficient by combinatorial methods. Concerning thin film deposition of oxide materials, pulsed-laser deposition (PLD) has been mostly applied for the creation of a continuous composition spread (CCS). Up to now, two or more targets were ablated sequentially and movable masks shadowed varying parts of the substrate to create the CCS. In this letter, we report on the realization of a suggestion of Hanak (J. Mater. Sci., 1970, 5, 964) made for sputter deposition and present various types of easy to realize CCS by using a single segmented PLD target. We model the elemental distribution and thickness variation within a two inch thin film for different experimental parameters. Further, we have deposited a thin film with one-dimensional CCS for MgxZn1−xO and found that the Mg concentration changes linearly across a 2 inch substrate. Further, we show for MgxZn1−xO:Al that this approach is suited for the realization of two-dimensional CCS with a linearly varying composition in two perpendicular composition gradients. Further geometries are suggested, illustrating the potential of this CCS technique.

Graphical abstract: Continuous composition spread using pulsed-laser deposition with a single segmented target

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Publication details

The article was received on 05 Jul 2013, accepted on 24 Sep 2013 and first published on 25 Sep 2013


Article type: Paper
DOI: 10.1039/C3CE41327F
CrystEngComm, 2013,15, 10020-10027

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    Continuous composition spread using pulsed-laser deposition with a single segmented target

    H. von Wenckstern, Z. Zhang, F. Schmidt, J. Lenzner, H. Hochmuth and M. Grundmann, CrystEngComm, 2013, 15, 10020
    DOI: 10.1039/C3CE41327F

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