Jump to main content
Jump to site search

Issue 24, 2012
Previous Article Next Article

In situ” hard mask materials: a new methodology for creation of vertical silicon nanopillar and nanowire arrays

Author affiliations

Abstract

A novel, simple and in situ hard mask technology that can be used to develop high aspect ratio silicon nanopillar and nanowire features on a substrate surface is demonstrated. The technique combines a block copolymer inclusion method that generates nanodot arrays on substrate and an inductively coupled plasma (ICP) etch processing step to fabricate Si nanopillar and nanowire arrays. Iron oxide was found to be an excellent resistant mask over silicon under the selected etching conditions. Features of a very high aspect ratio can be created by this method. The nanopillars have uniform diameter and smooth sidewalls throughout their entire length. The diameter (15–27 nm) and length of the nanopillars can be tuned easily. Different spectroscopic and microscopic techniques were used to examine the morphology and size, surface composition and crystallinity of the resultant patterns. The methodology developed may have important technological applications and provide an inexpensive manufacturing route to nanodimensioned topographical patterns. The high aspect ratio of the features may have importance in the area of photonics and the photoluminescence properties are found to be similar to those of surface-oxidized silicon nanocrystals and porous silicon.

Graphical abstract: “In situ” hard mask materials: a new methodology for creation of vertical silicon nanopillar and nanowire arrays

Back to tab navigation

Article information


Submitted
10 Sep 2012
Accepted
22 Oct 2012
First published
26 Oct 2012

Nanoscale, 2012,4, 7743-7750
Article type
Paper

In situ” hard mask materials: a new methodology for creation of vertical silicon nanopillar and nanowire arrays

T. Ghoshal, R. Senthamaraikannan, M. T. Shaw, J. D. Holmes and M. A. Morris, Nanoscale, 2012, 4, 7743
DOI: 10.1039/C2NR32693K

Social activity

Search articles by author

Spotlight

Advertisements