Environmentally friendly patterning of thin films in linear methyl siloxanes

Abstract

A number of green solvents have been explored to reduce the environmental impact of many chemical processes. Among them, linear methyl siloxanes make up a class of solvents that are low in toxicity, VOC exempt and not ozone-depleting. In addition, their unique physical properties such as low surface tension and low viscosity can mitigate several issues encountered with conventional processing solvents. In order to understand the behavior of linear methyl siloxanes as processing solvents, the solubilities of polymers and small molecular glasses are studied in this work. Using lithography as a test of solubility differences, we have successfully shown patterning of thin films in linear methyl siloxanes thereby demonstrating their utility in processing organic systems.