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Issue 1, 2012
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Tailored star-shaped statistical teroligomers viaATRP for lithographic applications

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Abstract

A series of five star-shaped teroligomers consisting of a saccharose core, and arms, composed of α-gamma butyrolactone methacrylate (GBLMA), methyl adamantyl methacrylate (MAMA) and hydroxyl adamantyl methacrylate (HAMA) with defined arm length and number of arms were prepared via the core-first atom transfer radical polymerization (ATRP) route. The saccharose core was modified with ATRP initiating sites and non-reactive sites, enabling the synthesis of star polymers with a smaller arm number but identical core. Star teroligomers were synthesized with narrow molecular weight distributions with low polydispersity indices (PDIs < 1.1) showing negligible side reactions only at higher conversions of Xp > 50%. The absence of side reaction and the precise achievement of the target molecular weight indicated excellent control over the reaction. A selected star-shaped teroligomer was investigated for the first time as a photoresist material. The delicate conditions of the lithographic process were optimized by a combinatorial approach. The obtained low line edge and line width roughness of the observed pattern demonstrate the potential of the star architecture for this application.

Graphical abstract: Tailored star-shaped statistical teroligomers viaATRP for lithographic applications

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Article information


Submitted
02 May 2011
Accepted
16 Sep 2011
First published
14 Oct 2011

J. Mater. Chem., 2012,22, 73-79
Article type
Paper

Tailored star-shaped statistical teroligomers viaATRP for lithographic applications

F. Wieberger, D. C. Forman, C. Neuber, A. H. Gröschel, M. Böhm, A. H. E. Müller, H. Schmidt and C. K. Ober, J. Mater. Chem., 2012, 22, 73
DOI: 10.1039/C1JM11922B

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