Issue 9, 2011
From the journal:

Lab on a Chip

Lithographic patterning on polydimethylsiloxane surfaces using polydimethylglutarimide†

Roger M. Diebold*ab  and  David R. Clarkea  

* Corresponding authors

a School of Engineering and Applied Sciences, Harvard University, 29 Oxford St, Cambridge, MA, USA
E-mail: rdiebold@seas.harvard.edu

b Materials Department, University of California, Santa Barbara, Santa Barbara, CA, USA

Abstract

We present a method for high fidelity lithographic patterning on polydimethylsiloxane (PDMS) surfaces employing traditional cleanroom equipment and commercially available materials that overcomes previous problems in PDMS processing. To illustrate this method, an electrostatically actuated microfluidic pump and rectangular diffraction gratings were fabricated on PDMS.

Graphical abstract: Lithographic patterning on polydimethylsiloxane surfaces using polydimethylglutarimide

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Article information

DOI
https://doi.org/10.1039/C0LC00732C
Article type
Technical Note
Submitted
29 Dec 2010
Accepted
10 Mar 2011
First published
29 Mar 2011

Lab Chip, 2011,11, 1694-1697

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Lithographic patterning on polydimethylsiloxane surfaces using polydimethylglutarimide

R. M. Diebold and D. R. Clarke, Lab Chip, 2011, 11, 1694 DOI: 10.1039/C0LC00732C

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