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Issue 38, 2011
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A facile route to patterned epitaxial ZnO nanostructures by soft lithography

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Abstract

Combining two robust, facile, and low cost techniques—nanoimprint lithography and low temperature aqueous solution phase epitaxy of ZnO—enabled the fabrication of nanostructured single crystal surfaces. Various patterns were fabricated with sub-micron resolution, including an array of 70 nm diameter posts. The method requires no vacuum equipment and has a maximum process temperature of 110 °C.

Graphical abstract: A facile route to patterned epitaxial ZnO nanostructures by soft lithography

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Publication details

The article was received on 07 Jul 2011, accepted on 05 Aug 2011 and first published on 19 Aug 2011


Article type: Communication
DOI: 10.1039/C1JM13167B
Citation: J. Mater. Chem., 2011,21, 14417-14419
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    A facile route to patterned epitaxial ZnO nanostructures by soft lithography

    J. J. Richardson, D. Estrada, S. P. DenBaars, C. J. Hawker and L. M. Campos, J. Mater. Chem., 2011, 21, 14417
    DOI: 10.1039/C1JM13167B

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