Surface patterning using templates: concept, properties and device applications

Abstract

Surface nano-patterns on substrates are the fundamental structures of various nano-devices. Template-based surface nano-patterning techniques are highly efficient methods in realizing different surface nano-patterns. The time-saving and low-cost fabrication processes of the template-based surface patterning are highly desirable for industry in fabricating different kinds of nano-devices. This tutorial review summarizes the recent advancements in the field of template-based surface nano-patterning, especially focusing on three templates prepared using self-assembly processes: ultra-thin alumina membranes, monolayer polystyrene sphere arrays, and block copolymer patterns. The basic concepts, the general fabrication processes, the structure-related properties, and the device applications of these template-based surface nano-patterning techniques are introduced.