Nanocrystalline diamond microstructures from Ar/H2/CH4-plasma chemical vapour deposition†
Abstract
The incorporation of H2 into Ar plasma was observed to markedly alter the microstructure of diamond films. The addition of a small percentage of H2 (<1.5%) into the Ar plasma leads to the presence of stacking faults in plate-like diamond grains, the incorporation of 75% H2 induces the formation of the